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EMULSITONE COMPANY
19 Leslie Court
Whippany, New Jersey 07981
TEL. (973)386-0053
FAX (973)503-0256
PALLADIUMFILM
Palladiumfilm is a solution designed to produce pure metallic palladium
films. The solution is coated on the substrate by spinning. A film results which consists
of a polymer with palladium dissolved in it. By heating the film to temperatures in excess
of 300oC in air, or an oxidizing medium, one obtains a brownish film of
palladium oxide. The palladium oxide film is the converted to metallic palladium by
heating at 400oC or higher, in forming gas (93% N2-7% H2),
for a few minutes. The metallic palladium film which results when the solution is spun at
1000 rpm is about 100 angstroms thick and exhibits a sheet resistivity of 75 ohm per
square. Palladium silicide may be formed when Palladiumfilm is applied as described above
and heat treatment is carried out at 625oC in forming gas. A continuous layer
of palladium silicide forms, with little interference from the ever present thin layer of
SiO2 found on the silicon which has been standing in air. Ohmic contacts may be
made to highly doped silicon surfaces while with less highly doped surfaces, one can form
Schottky diodes.
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