EMULSITONE COMPANY
19 Leslie Court
Whippany, New Jersey 07981
TEL. (973)386-0053
FAX (973)503-0256
TANTALUMSILICAFILM
Tantalumsilicafilm is a spin-on solution which yields a film consisting of
tantalum oxide and silicon dioxide. The solution is applied by spinning at 3000 rpms for
15 seconds in air. After spinning, the film should be baked at 200oC for 60
minutes in air. This is followed by a bake at 400oC in air for 15 minutes.
After the baking process the film will exhibit an index of refraction of 1.85 - 1.90. The
film thickness will be 800 angstroms.
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